Paramount – RF Plasma Generators Suppliers & Manufacturer in Germany

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Paramount - RF Plasma Generators

Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.

  • Full digital control for dynamic response to plasma changes
  • Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW
  • Advanced features for control optimization and synchronization
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Paramount – RF Plasma Generators

Features

• Full digital control, Arc management
• Frequency tuning, pulsing, and pulse   synchronization
• Real-time power and impedance   measurement
• Phase synchronization (CEX)

Slide
Paramount – RF Plasma Generators suppliers in Germany

Features

• Full digital control, Arc management
• Frequency tuning, pulsing, and pulse   synchronization
• Real-time power and impedance   measurement
• Phase synchronization (CEX)

Slide
Paramount – RF Plasma Generators back

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

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