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Paramount - RF Plasma Generators
Industry-Leading, Repeatable Power Delivery for Core Plasma Applications
Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.
- Full digital control for dynamic response to plasma changes
- Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW
- Advanced features for control optimization and synchronization
Features
• Full digital control, Arc management
• Frequency tuning, pulsing, and pulse synchronization
• Real-time power and impedance measurement
• Phase synchronization (CEX)
Features
• Full digital control, Arc management
• Frequency tuning, pulsing, and pulse synchronization
• Real-time power and impedance measurement
• Phase synchronization (CEX)
• High-power density in a streamlined design
• On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
• Wideband control loops, Optional pulse control
• High-speed arc management
Advance your process development with a new focus on operating flexibility. Paramount® RF generators offer wide frequency and power ranges, support multiple integration scenarios, and are equipped with standard serial or analog interfaces.
The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.
Benefits
- Enhance plasma stability and process repeatability
- Precisely control RF power
- Quickly respond to plasma changes
- Easily adapt to meet specific application needs
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Paramount Series Datasheet