Paramount - RF Plasma Generators - HVP

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Paramount – RF Plasma Generators

Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.

  • Full digital control for dynamic response to plasma changes
  • Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW
  • Advanced features for control optimization and synchronization

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SPS Series

Features

• Full digital control, Arc management
• Frequency tuning, pulsing, and pulse   synchronization
• Real-time power and impedance   measurement
• Phase synchronization (CEX)

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AA Series

Features

• Full digital control, Arc management
• Frequency tuning, pulsing, and pulse   synchronization
• Real-time power and impedance   measurement
• Phase synchronization (CEX)

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AA Series

• High-power density in a streamlined design 
• On-board chamber mount, on-tool frame   mount, rack mount, and shoebox options 
• Wideband control loops, Optional pulse   control
• High-speed arc management

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Overview
Technical Specs
Data Sheets
Overview

Advance your process development with a new focus on operating flexibility. Paramount® RF generators offer wide frequency and power ranges, support multiple integration scenarios, and are equipped with standard serial or analog interfaces.

The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.

 

     Benefits

  • Enhance plasma stability and process repeatability
  • Precisely control RF power
  • Quickly respond to plasma changes
  • Easily adapt to meet specific application needs

Technical Specs

Power Level
Paramount MF: 2, 3, 5, and 8 kW
Paramount HF: 1.5, 3, and 6 kW

Frequencies
Paramount MF: 400 kHz, frequency tuning ± 10%
Paramount HF: 13 MHz, frequency tuning ± 10%

AC Input
208 VAC

Line Frequnency
50/60 Hz

Cooling
Air and Water

Operating Ambient Temp. Range
+5°C to +40°C

Advanced Features
Paramount MF: Pulsing, CEX
Paramount HF: Pulsing, arc management, CEX

Available Interfaces
RS-232, User Port, Ethernet, DeviceNet, Profibus, EtherCAT

 

Data Sheets

Paramount Series Datasheet Implementation of Paramount 3013 in Implanter Tools Apex and Paramount RF Generator Comparison