Paramount Plus - RF Plasma Generators - HVP

Home / Products / High Frequency / Plasma Power Generators / RF Plasma Generators / Paramount Plus

Paramount Plus – RF Plasma Generators

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Paramount Plus offers progressive technology and customizable features that include premier pulsing control.

  • Precise RF and pulse control
  • Fast response to plasma changes
  • Built-in diagnostic tools

Slide
SPS Series

• Enhanced RF stability, tightly regulated   power output
• Advanced multi-level pulsing
• Pulse synchronization and monitoring
• Real-time power and impedance   measurement
• Advanced FastDAQ data acquisition   system

Slide
AA Series

• Enhanced RF stability, tightly regulated   power output
• Advanced multi-level pulsing
• Pulse synchronization and monitoring
• Real-time power and impedance   measurement
• Advanced FastDAQ data acquisition   system

Slide
AA Series

• Enhanced RF stability, tightly regulated   power output
• Advanced multi-level pulsing
• Pulse synchronization and monitoring
• Real-time power and impedance   measurement
• Advanced FastDAQ data acquisition   system

previous arrow
next arrow

Overview
Technical Specs
Data Sheets
Overview

Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.

 

     Benefits

  • Precisely control RF
  • Enhance plasma stability
  • Expedite plasma transitions
  • Reduce process times
  • Improve process repeatability and chamber matching

Technical Specs

Power Level
Paramount Plus MF: 5 and 15 kW
Paramount Plus VHF: 3 and 6 kW

Frequencies
Paramount Plus MF: 2 MHz, freq. tuning ± 10%
Paramount Plus VHF: 27, 40 and 60 MHz, freq. tuning ± 5%

Available Interfaced
RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT

AC Input
Paramount Plus MF: 200/240 VAC, 400/480 VAC
Paramount Plus VHF: 200/240 VAC, 400/480 VAC

Line Frequency
50/60 Hz

Cooling
Air and water

Operating Ambient Temp. Range
+5°C to +40°C

Advanced Features
Multi-level pulsing, arc management, CEX

 

Data Sheets

Paramount Plus Series Datasheet