ET Series - High Voltage Power Supply

The ET Series of 2000 watt high voltage supplies feature flexible embedded controls with low ripple and noise. They are air insulated, fast response units, with tight regulation and extremely low arc discharge currents.

Typical Applications

  • Semiconductor Fabrication Equipment
  • Ion Implantation
  • Physical Vapor Deposition
  • Electron Beam Lithography

Input Voltage
198-264 VAC, 48-63 Hz single phase, 4000 VA maximum


Output Voltage

from 0-1 kVDC through 0-60 kVDC

Output Power
2000 Watt

Polarity
Available as positive, negative or reversible (replace x in part number with -P, -N or -R)

Operating Ambient Temperature
-20 to +40°C

Ripple

less than 0.025% of rated voltage at full load


Programming
Front panel digital encoders provide high resolution local adjustment of voltage and current program. Integral RS-232, USB and optional ethernet communications provide remote control program and monitor

Standards
EN61010/ IEC61010, Safety
EN61000-6-4, Conducted and Radiated Emissions
EN61000-6-2:2005, Conducted and Radiated Immunity
2011/65/EU, Restriction of the use of Hazardous Substances (RoHS)

SeriesMax. Output Voltage Max. Output Current Max. Output PowerInput VoltageRipple better than
ET1R20000 - 1 kV2000 mA2 kWSingle Phase0.025%
ET1.5R13000 - 1.5 kV1300 mA2 kWSingle Phase0.025%
ET2R10000 - 2 kV1000 mA2 kWSingle Phase0.025%
ET3R6600 - 3 kV660 mA2 kWSingle Phase0.025%
ET5R4000 - 5 kV400 mA2 kWSingle Phase0.025%
ET6R3300 - 6 kV330 mA2 kWSingle Phase0.025%
ET8R2500 - 8 kV250 mA2 kWSingle Phase0.025%
ET10R2000 - 10 kV200 mA2 kWSingle Phase0.025%
ET12R1650 - 12 kV165 mA2 kWSingle Phase0.025%
ET15R1320 - 15 kV132 mA2 kWSingle Phase0.025%
ET20R1000 - 20 kV100 mA2 kWSingle Phase0.025%
ET25R800 - 25 kV80 mA2 kWSingle Phase0.025%
ET30R660 - 30 kV66 mA2 kWSingle Phase0.025%
ET40R500 - 40 kV50 mA2 kWSingle Phase0.025%
ET50R400 - 50 kV40 mA2 kWSingle Phase0.025%
ET60R330 - 60 kV33 mA2 kWSingle Phase0.025%