ET Series - High Voltage Power Supply

The ET Series of 2000 watt high voltage supplies feature flexible embedded controls with low ripple and noise. They are air insulated, fast response units, with tight regulation and extremely low arc discharge currents.

Typical Applications

Semiconductor Fabrication Equipment
Ion Implantation
Physical Vapor Deposition
Electron Beam Lithography

Technical Information
Products
Data Sheet

Input Voltage
198-264 VAC, 48-63 Hz single phase, 4000 VA maximum

Output Voltage
from 0-1 kVDC through 0-60 kVDC

Output Power
2000 Watt

Polarity
Available as positive, negative or reversible (replace x in part number with -P, -N or -R)

Operating Ambient Temperature
-20 to +40°C

Ripple
less than 0.025% of rated voltage at full load

Programming
Front panel digital encoders provide high resolution local adjustment of voltage and current program. Integral RS-232, USB and optional ethernet communications provide remote control program and monitor

Standards
EN61010/ IEC61010, Safety
EN61000-6-4, Conducted and Radiated Emissions
EN61000-6-2:2005, Conducted and Radiated Immunity
2011/65/EU, Restriction of the use of Hazardous Substances (RoHS)

Series	Max. Output Voltage	Max. Output Current	Max. Output Power	Input Voltage	Ripple better than
ET1R2000	0 - 1 kV	2000 mA	2 kW	Single Phase	0.025%
ET1.5R1300	0 - 1.5 kV	1300 mA	2 kW	Single Phase	0.025%
ET2R1000	0 - 2 kV	1000 mA	2 kW	Single Phase	0.025%
ET3R660	0 - 3 kV	660 mA	2 kW	Single Phase	0.025%
ET5R400	0 - 5 kV	400 mA	2 kW	Single Phase	0.025%
ET6R330	0 - 6 kV	330 mA	2 kW	Single Phase	0.025%
ET8X250	0 - 8 kV	250 mA	2 kW	Single Phase	0.025%
ET8P250	0 - 8 kV	250 mA	2 kW	Single Phase	0.025%
ET8N250	0 - 8 kV	250 mA	2 kW	Single Phase	0.025%
ET8R250	0 - 8 kV	250 mA	2 kW	Single Phase	0.025%
ET10X200	0 - 10 kV	200 mA	2 kW	Single Phase	0.025%
ET10P200	0 - 10 kV	200 mA	2 kW	Single Phase	0.025%
ET10N200	0 - 10 kV	200 mA	2 kW	Single Phase	0.025%
ET10R200	0 - 10 kV	200 mA	2 kW	Single Phase	0.025%
ET12X165	0 - 12 kV	165 mA	2 kW	Single Phase	0.025%
ET12P165	0 - 12 kV	165 mA	2 kW	Single Phase	0.025%
ET12N165	0 - 12 kV	165 mA	2 kW	Single Phase	0.025%
ET12R165	0 - 12 kV	165 mA	2 kW	Single Phase	0.025%
ET15X132	0 - 15 kV	132 mA	2 kW	Single Phase	0.025%
ET15P132	0 - 15 kV	132 mA	2 kW	Single Phase	0.025%
ET15N132	0 - 15 kV	132 mA	2 kW	Single Phase	0.025%
ET15R132	0 - 15 kV	132 mA	2 kW	Single Phase	0.025%
ET20X100	0 - 20 kV	100 mA	2 kW	Single Phase	0.025%
ET20P100	0 - 20 kV	100 mA	2 kW	Single Phase	0.025%
ET20N100	0 - 20 kV	100 mA	2 kW	Single Phase	0.025%
ET20R100	0 - 20 kV	100 mA	2 kW	Single Phase	0.025%
ET25X80	0 - 25 kV	80 mA	2 kW	Single Phase	0.025%
ET25P80	0 - 25 kV	80 mA	2 kW	Single Phase	0.025%
ET25N80	0 - 25 kV	80 mA	2 kW	Single Phase	0.025%
ET25R80	0 - 25 kV	80 mA	2 kW	Single Phase	0.025%
ET30X66	0 - 30 kV	66 mA	2 kW	Single Phase	0.025%
ET30P66	0 - 30 kV	66 mA	2 kW	Single Phase	0.025%
ET30N66	0 - 30 kV	66 mA	2 kW	Single Phase	0.025%
ET30R66	0 - 30 kV	66 mA	2 kW	Single Phase	0.025%
ET40X50	0 - 40 kV	50 mA	2 kW	Single Phase	0.025%
ET40P50	0 - 40 kV	50 mA	2 kW	Single Phase	0.025%
ET40N50	0 - 40 kV	50 mA	2 kW	Single Phase	0.025%
ET40R50	0 - 40 kV	50 mA	2 kW	Single Phase	0.025%
ET50X40	0 - 50 kV	40 mA	2 kW	Single Phase	0.025%
ET50P40	0 - 50 kV	40 mA	2 kW	Single Phase	0.025%
ET50N40	0 - 50 kV	40 mA	2 kW	Single Phase	0.025%
ET50R40	0 - 50 kV	40 mA	2 kW	Single Phase	0.025%
ET60X33	0 - 60 kV	33 mA	2 kW	Single Phase	0.025%
ET60P33	0 - 60 kV	33 mA	2 kW	Single Phase	0.025%
ET60N33	0 - 60 kV	33 mA	2 kW	Single Phase	0.025%
ET60R33	0 - 60 kV	33 mA	2 kW	Single Phase	0.025%

ET Series

ET Series - High Voltage Power Supply

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