PDX - RF Plasma Generators

Proven, Mid-Frequency Workhorse with Industry-Leading Reliability

The PDX series features mid frequency power supplies that enhance process flexibility and optimize control.

  • Available in power ranging from 1250 to 8000 W
  • Wide frequency range operation
  • Remote operation capabilities

Features

  • Sinusoidal RF output for low harmonic distortion 
  • Low EMI/RFI, Tightly regulated output power
  • Robust frequency range for optimal process control

Features

  • Sinusoidal RF output for low harmonic distortion 
  • Low EMI/RFI, Tightly regulated output power
  • Robust frequency range for optimal process control

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Need a highly efficient, compact, easy-to-integrate power source? The PDX® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It’s wide frequency range of operation delivers optimal control across numerous applications.

The PDX low-power (LP) series is available in 1250 W and 1400 W versions and the PDX high-power (HP) series is available in 5000 W and 8000 W versions.

     Benefits

  • Enhance process flexibility
  • Improve throughput
  • Optimize process control
  • Ensure high repeatability
  • Ease integration