Cesar - RF Plasma Generators

Unparalleled Breadth of RF-Application Delivery without Custom Lead Times

Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs.

  • Customized performance without custom lead times
  • Reliable design for maximum uptime
  • Powerful user interface for easy operation
  • Compact, streamlined design and standard platform packaging for easy replacement
  • High efficiency — less heat generated
  • RS-232, Ethernet, and Profibus communication
  • Active front panel with convenient, comprehensive operating menu
  • CEX (phase synch) operation mode

The proven Cesar platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs.

Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high quality components, Cesar RF generators maximize reliability and productivity.

       Benefits

  • Increase process uptime thanks to highly reliable design and quality components
  • Customize performance without custom-unit lead times
  • Enhance operational ease and flexibility

Power Level
Cesar MF: 600 W, 1 kW, 2 kW, 2.5 kW, 3 kW, 5 kW
Cesar HF: 300 W, 600 W, 1 kW, 1.2 kW, 2 kW, 2.5kW, 3kW, 5kW
Cesar VHF: 300 W, 500 W, 600 W, 1 kW, 2 kW, 4 kW

Frequencies
Cesar MF: 2 MHz, 4MHz
Cesar HF: 13 MHz
Cesar VHF: 27 MHz, 40 MHz

Available Interfaces
Analog, RS-232, Ethernet, Profibus, Active Front Panel

AC Input
208 and 400 VAC

Line Frequency
50/60 Hz

Cooling

Air or Water

Cooling Water Temperature

20 to 30°C

Advanced Features

High Efficiency, Active Front Panel, CEX