Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs.
The proven Cesar platform delivers consistent RF power, withstanding the harshest conditions in plasma processes. The platform expertly handles high-load mismatches and remains fully functional at rated-reflected power. Cesar RF generators boast highly intuitive operating menus — accessible on large, front panel LCDs — that increase efficiency and minimize training costs.
Available in a diverse selection of models (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW) and equipped with high quality components, Cesar RF generators maximize reliability and productivity.
Benefits
Power Level
Cesar MF:
600 W, 1 kW, 2 kW, 2.5 kW, 3 kW, 5 kW
Cesar HF: 300 W, 600 W, 1 kW, 1.2 kW, 2 kW, 2.5kW, 3kW, 5kW
Cesar VHF:
300 W, 500 W, 600 W, 1 kW, 2 kW, 4 kW
Frequencies
Cesar MF: 2 MHz, 4MHz
Cesar HF: 13 MHz
Cesar VHF: 27 MHz, 40 MHz
Available Interfaces
Analog, RS-232, Ethernet, Profibus, Active Front Panel
AC Input
208 and 400 VAC
Line Frequency
50/60 Hz
Cooling
Air or Water
Cooling Water Temperature
20 to 30°C
Advanced Features
High Efficiency, Active Front Panel, CEX