Paramount Plus - RF Plasma Generators

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Paramount Plus offers progressive technology and customizable features that include premier pulsing control.

  • Precise RF and pulse control
  • Fast response to plasma changes
  • Built-in diagnostic tools
  • Enhanced RF stability, tightly regulated power output
  • Advanced multi-level pulsing
  • Pulse synchronization and monitoring
  • Real-time power and impedance measurement
  • Advanced FastDAQ data acquisition system

  • Enhanced RF stability, tightly regulated power output
  • Advanced multi-level pulsing
  • Pulse synchronization and monitoring
  • Real-time power and impedance measurement
  • Advanced FastDAQ data acquisition system

  • Enhanced RF stability, tightly regulated power output
  • Advanced multi-level pulsing
  • Pulse synchronization and monitoring
  • Real-time power and impedance measurement
  • Advanced FastDAQ data acquisition system

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Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 400 kHz to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.

     Benefits

  • Precisely control RF
  • Enhance plasma stability
  • Expedite plasma transitions
  • Reduce process times
  • Improve process repeatability and chamber matching

Power Level
Paramount Plus MF: 5 and 15 kW
Paramount Plus VHF: 3 and 6 kW

Frequencies
Paramount Plus MF: 2 MHz, freq. tuning ± 10%
Paramount Plus VHF: 27, 40 and 60 MHz, freq. tuning ± 5%

Available Interfaced
RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT

AC Input
Paramount Plus MF: 200/240 VAC, 400/480 VAC
Paramount Plus VHF: 200/240 VAC, 400/480 VAC

Line Frequency
50/60 Hz

Cooling
Air and water

Operating Ambient Temp. Range
+5°C to +40°C

Advanced Features
Multi-level pulsing, arc management, CEX

Paramount Plus Series Datasheet