Navio - RF Match Networks

Economical, Digital, Configurable Matching Network Solution

The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.

  • Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
  • Efficient and stable power delivery
  • Compact and air-cooled (standard package or slim version)
  • Quick, accurate, and repeatable impedance matching
  • Optimized, off-the-shelf functionality for many applications
  • Generous menu of configuration options for more sophisticated processes
  • Wide power and frequency ranges
  • Compact air-cooled unit available in a standard or slim version

Experience simplicity and high reliability in a single, affordable package. The Navio™ matching network leverages our power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual Front Panel software is available for monitoring.

     Benefits

  • Improve throughput, increase yield, and reduce production costs
  • Choose a standard model or configure a unit that meets your system requirements
  • Install and operate with ease
  • Obtain excellent repeatability for high process yield

Power Range
1,3 and 5 kW

Frequencies
13 to 60 MHz

Input Power
24 VDC or 110 VAC

Tune Time (Typical)
2 to 3 seconds

Cooling
Air

Available Interfaces
Analog, RS 232, Profibus